Executive Summary | Thin film optics lifetime under exposure to high laser fluence levels benefit from having both high laser damage threshold and low optical absorption. Plasma Process Group has developed the Techne Ion Beam Sputtering deposition tool for manufacturing these challenging coatings. Plasma Optik has optimized Techne process parameters to both maximize laser damage threshold and minimize absorption. This paper explains 1-on-1, S-on-1 and LLNL-TR-740296 (used for National Ignition Facility applications) laser damage testing methodologies. Also discussed are details of photothermal common path interferometry (PCI) used for optical absorption testing. Techne system laser damage performance data generated with the LLNLTR-740296 testing procedure on 1064nm and 532nm high reflector mirrors made with the Techne system is given along with PCI data from similar optics. Finally, comparison is made between laser damage values from Mil-Spec 10-5 and super-polished substrates with similar high-reflector coatings.
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